Exhaust gas particle sensor

摘要

The particle sensor has interdigital electrode systems (1a,1b) made of two comb-shaped interconnected interdigital electrodes. A measuring chamber (3) is formed with a gas inlet (4) and a gas outlet (5) in a support element (2). The interdigital electrode systems are arranged in the measuring chamber. Independent claims are also included for the following: (1) a method for detecting particles in a gas flow; and (2) a method for manufacturing the particle sensor.