| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage device for effectively preventing the temperature increase of a stage top plate, without generating precision deterioration, using a low-cost configurations. SOLUTION: This stage device is provided with a stage moving part 5 for holding and moving an object to be processed, a bearing means 24 formed in the stage-moving part and a stage guide part 25 having a guide face to guide the stage-moving part through the bearing means. This stage device is provided with temperature-adjusting means 27, 28a and 28b for adjusting the temperature of the stage guide part for controlling the temperature of the stage-moving part so that it is possible to control the temperature of the stage-moving part, by controlling the transfer of heat via the bearing means by the temperature adjusting means. COPYRIGHT: (C)2005,JPO&NCIPI |
