发明名称 |
Charged particle beam PVD device, shielding device, coating chamber for coating substrates, and method of coating |
摘要 |
A charged particle beam PVD device is provided, including a target (262) of coating material inside of a casing (261), a vapor aperture (263) provided in the casing, and a shielding device (266, 268; 2680) provided adjacent to the vapor aperture, the shielding device being on floating potential.
|
申请公布号 |
EP2209132(A1) |
申请公布日期 |
2010.07.21 |
申请号 |
EP20090150786 |
申请日期 |
2009.01.16 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
KREMPEL-HESSE, JOERG;GRILLMAYER, JUERGEN;HERMANNS, UWE |
分类号 |
H01J37/34 |
主分类号 |
H01J37/34 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|