GAS DETECTING SENSOR USING SURFACE ACOUSTIC WAVE AND GAS DETECTING METHOD THEREOF

摘要

PURPOSE: A gas detect sensor using a SAW device and a sensing method for the same are provided to improve the sensitivity of gas detection with comparing measuring times of two electric signals by measuring the electrical signal of conductive member. CONSTITUTION: A gas detect sensor using a SAW device comprises a SAW(Surface Acoustic Wave) device(110) which includes a piezoelectric substrate(111), an input and an output IDT(Inter-Digital Transducer)(113,115) formed on the piezoelectric substrate, a conductive member(130) which is formed between the input and the output IDT on the SAW device and generates the electrical change by responding fast and sensitively to the gas exposure, a first signal detection unit(150) which detects the electric signal delivered to the output IDT, a second signal detection unit(170) which detects the electric signal at the conductive member, and a signal analysis unit(190) which synchronizes the detection time of the electric signal respectively detected at the first signal detection unit and the second signal detection unit and senses the gas exposure by analyzing two electric signals synchronized by the gas exposure.