发明名称 Systems and methods for near-field heterodyne spectroscopy
摘要 In a near-field heterodyne spectroscopy system, a near-field generation device receives the output of a pump beam source and is also made to vibrate or move at a frequency f to generate a modulated near-field beam having a near-field component. The outputs of the pump beam source and a probe beam source (optional) as well as the modulated near-field beam are directed to the same point on a sample. At least one of the outputs of the pump beam source and probe beam source is modulated at a frequency &OHgr;. Thus, the reflected beam that results from the interaction with the region illuminated by the modulated near-field beam is modulated at frequencies &OHgr;+f and &OHgr;−f. Because the excitation is near-field, the electric field in the sample is evanescent and ensures a shallow probing depth as well as smaller lateral dimensions beyond diffraction limit.
申请公布号 US7760364(B1) 申请公布日期 2010.07.20
申请号 US20080256324 申请日期 2008.10.22
申请人 KLA-TENCOR CORPORATION 发明人 ZHUANG GUORONG V.;FIELDEN JOHN;BEVIS CHRISTOPHER F.
分类号 G01B9/02 主分类号 G01B9/02
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