发明名称 Driving apparatus, optical system, exposure apparatus and device fabrication method
摘要 A driving apparatus comprising an optical element, a supporting block for supporting said optical element by contacting said optical element onto three supporting contact areas, a driving mechanism for practically connecting said supporting block to three driving contact areas and for moving said supporting block via the driving contact area, wherein a difference between an angle of each of the three supporting contact areas in a rotational direction around a rotation axis and an angle of each of the three driving contact areas corresponding with the three supporting contact areas is 10° or smaller, where the three supporting areas are substantially located on a first plane, and the rotational axis which is perpendicular to the first plane and passes through a barycenter of the three supporting contact areas.
申请公布号 US7760452(B2) 申请公布日期 2010.07.20
申请号 US20040830749 申请日期 2004.04.23
申请人 CANON KABUSHIKI KAISHA 发明人 MIZUNO MAKOTO
分类号 G02B7/02;G02B7/182;G03F7/20 主分类号 G02B7/02
代理机构 代理人
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