发明名称 Method of forming a sensor node module
摘要 A method of manufacturing a sensor node module includes forming a protruding structure on a carrier. A sensor die is applied onto the protruding structure with an active sensing surface of the sensor die facing the carrier. The sensor die is encapsulated with mold material, wherein the protruding structure prevents the mold material from covering the active sensing surface. The carrier and the protruding structure are removed from the sensor die.
申请公布号 US7759135(B2) 申请公布日期 2010.07.20
申请号 US20080242163 申请日期 2008.09.30
申请人 INFINEON TECHNOLOGIES AG 发明人 THEUSS HORST
分类号 H01L21/00;H01L21/44;H01L23/22;H01L23/58;H01L27/14 主分类号 H01L21/00
代理机构 代理人
主权项
地址