发明名称 LAYERED PHOTOSENSITIVE-RESIN PRODUCT
摘要 <p>A layered photosensitive-resin product which includes a photosensitive-resin layer having a thickness of 3-15μm and which, despite the small photosensitive-layer thickness, has satisfactory tenting properties even when exposed by direct writing exposure. This layered product upon development gives aggregates which are not oily. The layered photosensitive-resin product comprises superposed layers composed of a base layer and a photosensitive-resin layer. This product is characterized in that the photosensitive-resin layer is made of a photosensitive resin composition and that the photosensitive resin composition comprises (a) 25-64 mass% alkali-soluble resin, (b) a compound having a photopolymerizable unsaturated double bond, and (c) 0.1-20 mass% photopolymerization initiator. The product is further characterized by satisfying the following (i), (ii), and (iii): (i) a specific photopolymerizable unsaturated compound is contained in an amount of 30-55 mass% based on the whole photosensitive resin composition; (ii) the alkali-soluble resin (a) has a weight-average molecular weight of 70,000-220,000 and an acid equivalent of 100-600; and (iii) the photosensitive-resin layer has a thickness of 3-15μm.</p>
申请公布号 KR20100082852(A) 申请公布日期 2010.07.20
申请号 KR20107010522 申请日期 2008.12.24
申请人 ASAHI KASEI E-MATERIALS CORPORATION 发明人 NISHIMOTO HIDEAKI
分类号 G03F7/027;G03F7/031;H01L21/027;H05K3/06 主分类号 G03F7/027
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