发明名称 Method of manufacturing array substrate for liquid crystal display device with gate pad terminal acting as etching mask
摘要 A method of manufacturing an array substrate for a liquid crystal display device includes forming a gate electrode, a gate line, and a gate pad on a substrate, forming a gate insulating layer on the gate electrode, the gate line, and the gate pad, forming an active layer on the gate insulating layer, forming an ohmic contact layer on the active layer, forming source and drain electrodes, a data line and a data pad on the ohmic contact layer, forming a pixel electrode, forming a gate pad terminal on the gate insulating layer, forming a data pad terminal covering the data pad, forming a passivation layer on the pixel electrode, the gate pad terminal and the data pad terminal, exposing the gate pad terminal and the gate pad by etching the passivation layer and the gate insulating layer, and exposing the data pad terminal by etching the passivation layer.
申请公布号 US7760318(B2) 申请公布日期 2010.07.20
申请号 US20050255869 申请日期 2005.10.24
申请人 LG DISPLAY CO., LTD. 发明人 LEE KYOUNG-MOOK;CHOI NACK-BONG;NAM SEUNG-HEE;OH JAE-YOUNG
分类号 G02F1/1343;G02F1/1345;G02F1/1362;G02F1/1368;G09G3/36;H01L21/336;H01L21/77;H01L27/12 主分类号 G02F1/1343
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