SYSTEM FOR TEACHING TRANSFER ROBOT OF SEMICONDUCT AND METHOD FOR THEREOF

摘要

PURPOSE: A teaching system and a teaching method of a semiconductor transfer robot are provided to prevent a transfer error of a wafer by transferring and grasping a wafer in a receiver by using an image sensor. CONSTITUTION: A jig(110) has a circular shape corresponding to a wafer shape. The jig forms an indicator on the upper or lower side. A sensor module(120) comprises a body(121), a first image sensor(122) and a second image sensor(123). A transfer robot(130) mounts and transfers the sensor module or wafer. A controller(140) controls the transfer robot to grasp and transfer the wafer received in the receiver to a wanted position.