DIFFUSER GRAVITY SUPPORT AND METHOD FOR DEPOSITING A THIN FILM USING THE SAME

摘要

PURPOSE: A diffusion unit gravity supporting part and thin film plating method using the same can prevent to be lengthened of the gas distribution plate or the diffusion unit by supporting the gas distribution plate within the plasma chamber or the diffusion unit. CONSTITUTION: The gas distributing shower head is arranged within the chamber(100) body. The gas distributing shower head has the first surface and the second back side facing the first surface. The gas distributing shower head has a plurality of gas passages for being expanded between the first surface and the second back side. The backing plate(28) has two or more openings formed to be penetrated. It is arranged through one or more opening of the backing plate and one or more supporting member is connected to the backing plate and gas distributing shower head.