| 摘要 |
PURPOSE: An apparatus for measuring a location, a film forming method, and a computer readable record medium and film forming apparatus are provided to precisely measure the location of an object by performing an error correction process. CONSTITUTION: Three or more measuring points are located on the planar surface of an object(400a). Distances with respect to the three or more measuring points are measured to a horizontal direction by a distance measuring unit including three displacement sensors(1110, 1120, 1130). An image taking unit including an image sensor(1150) and an image acquisition unit takes the projected image of the planar surface of the object from a horizontal direction. Based on slope information and the projected image, the location information of the object are acquired in a calculating unit.
|
