| 摘要 |
PURPOSE: An apparatus for aligning a semiconductor wafer is provided to correct the center of the wafer with a reference position based on the alignment mark including the peripheral position, the notch, and the orientation plat of the wafer. CONSTITUTION: The size of a supporting stage(1) is larger than that of the outer shape of a wafer(W). An optical sensor(2) optically detects the peripheral position of the wafer on the supporting stage. A charge-coupled device camera(3) detects the phase position of a notch which determines the location of the wafer. A driving unit(M) rotates the supporting stage. Based on the detection result of the optical sensor, the alignment of the wafer is implemented.
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