| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing device for thin-film solar cell in which a laser scribing processing is desirably performed with the film forming surface of a substrate facing downward, as is disclosed as a conventional technique example. <P>SOLUTION: In a conveying method of the substrate by using a conveying apparatus to absorb the upper surface of the substrate and grip the substrate having a thin plate formed on one surface thereof with the thin-film forming surface facing downward, when the substrate conveyance is carried out which is equipped with a clearance of a blow-out port of an air-floating unit arranged with a clearance, and a lift pin for elevating and descending the substrate on the periphery thereof, after the substrate is supported by the lift pin arranged at a position which does not affect the function of the substrate after the processing of the substrate provided with a thin film surface formed on the lower surface of the substrate, the substrate is descended at a low speed on the air-floating unit arranged at the position which does not affect the function of the substrate after the processing of the substrate provided with a thin film surface formed on the lower surface of the substrate. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
