摘要 |
<P>PROBLEM TO BE SOLVED: To provide an actuator which can effectively improve generation force without remarkably reducing a displacement amount. Ž<P>SOLUTION: The actuator includes a multilayer electrode 20 and a multilayer electrode 21, which have a plurality of conductive layers having conductive materials, and an ion conduction layer which exists between the multilayer electrode 20 and the multilayer electrode 21 and has an ion conductive material. The conductive material that at least one conductive layer which is not adjacent to the ion conduction layer in a plurality of the conductive layers that the multilayer electrode 20 has is oriented in a direction vertical to a film thickness direction and in one axial direction. The conductive material which the conductive layer adjacent to the ion conduction layer in a plurality of conductive layers that the multilayer electrode 20 has is oriented in a direction except for the vertical direction to the film thickness direction. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|