THIN FILM FORMATION APPARATUS

摘要

PURPOSE: A thin film pattern forming device, which improves the electrical characteristic of chips and increases reliability and yield are provided to control the dispersing of pattern formed on a sheet. CONSTITUTION: A thin film pattern forming device comprises a cooling drum, a mask(130) and a conveyor belt(150). The cooling drum cools the sheet in order to mold the thin film pattern in the sheet. A mask comprises the mask pattern corresponding to the thin film pattern evaporated on the sheet. The mask is arranged so that in the conveyor belt, the mask pattern expose. The conveyor belt is arranged so that mask move to the cooling drum. The mask comprises the insertion part(134) which is perpendicularly projected.