发明名称 AUTOMATIC PALLET EXCHANGE APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide an automatic pallet exchange apparatus which achieves miniaturization and reduction in exchange time. <P>SOLUTION: An automatic pallet exchange apparatus includes: a pallet magazine 1 for accommodating a plurality of pallets 3 each including a plurality of projections 16 extending horizontally, respectively, so as to put them in and out in a horizontal direction; a pallet fixing part 23 for horizontally fixing the pallet 3 by engaging the plurality of projections 16 to a plurality of recesses 17; and a pallet fixing table 20 wherein the pallet fixing part 23 is disposed. By horizontally turning and horizontally moving the pallet 3 fixed horizontally by the pallet fixing part 23, the pallet 3 is exchanged between the pallet fixing table 20 and the pallet magazine 1. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010157657(A) 申请公布日期 2010.07.15
申请号 JP20090000073 申请日期 2009.01.05
申请人 PANASONIC CORP 发明人 TAKANAMI YASUO
分类号 H01L21/677;H01L21/52 主分类号 H01L21/677
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