| 摘要 |
PROBLEM TO BE SOLVED: To provide a means for moving a large glass sheet having fragile mechanical properties at high speed without touching the major surface of the sheet. SOLUTION: Gas is provided to the bearing's orifices (22) from a plenum which operates at a pressure P<SB>plenum</SB>and the bearings have a calculated static pressure P<SB>midpoint</SB>at the midpoints (27) between the bearing's centermost orifice (26) and each of its nearest orifice (28) in a horizontal direction which satisfies the relationship P<SB>midpoint</SB>/P<SB>plenum</SB>≥0.05. The bearing (3) can reduce the time-averaged peak-to-peak variation in the spacing between a LCD substrate (13) traveling at, for example, 60 m/min and the face (20) of the bearing (3) to less than 500μm, thus reducing the chances that the substrate (13) will hit and be damaged by the bearing (3). COPYRIGHT: (C)2010,JPO&INPIT |
