发明名称 |
ULTRA-THIN MICROPOROUS/HYBRID MATERIALS |
摘要 |
Ultra-thin hybrid and/or microporous materials and methods for their fabrication are provided. In one embodiment, the exemplary hybrid membranes can be formed including successive surface activation and reaction steps on a porous support that is patterned or non-patterned. The surface activation can be performed using remote plasma exposure to locally activate the exterior surfaces of porous support. Organic/inorganic hybrid precursors such as organometallic silane precursors can be condensed on the locally activated exterior surfaces, whereby ALD reactions can then take place between the condensed hybrid precursors and a reactant. Various embodiments can also include an intermittent replacement of ALD precursors during the membrane formation so as to enhance the hybrid molecular network of the membranes.
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申请公布号 |
US2010178468(A1) |
申请公布日期 |
2010.07.15 |
申请号 |
US20080271719 |
申请日期 |
2008.11.14 |
申请人 |
JIANG YING-BING;CECCHI JOSEPH L;BRINKER C JEFFREY |
发明人 |
JIANG YING-BING;CECCHI JOSEPH L.;BRINKER C. JEFFREY |
分类号 |
C23C16/02;B05D3/06;B32B3/02;B32B3/26 |
主分类号 |
C23C16/02 |
代理机构 |
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