发明名称 Semiconductor device, method for manufacturing the same, and multilayer substrate having the same
摘要 A method for manufacturing a semiconductor device includes: preparing a wafer formed of a SOI substrate; forming a circuit portion in a principal surface portion; removing a support substrate of the SOI substrate; fixing an insulation member on a backside of a semiconductor layer so as to be opposite to the circuit portion; dicing the wafer and dividing the wafer into multiple chips; arranging a first conductive member on the insulation member so as to be opposite to a part of the low potential reference circuit, and arranging a second conductive member on the insulation member so as to be opposite to a part of the high potential reference circuit; and coupling the first conductive member with a first part of the low potential reference circuit, and coupling the second conductive member with a second part of the high potential reference circuit.
申请公布号 US2010176480(A1) 申请公布日期 2010.07.15
申请号 US20090654707 申请日期 2009.12.29
申请人 DENSO CORPORATION 发明人 SENDA KOUJI;SHIRAKI SATOSHI;MAEDA YUKIHIRO;HIROSE SHINICHI;FUJII TETSUO;NAKANO TAKASHI
分类号 H01L27/06;H01L21/78 主分类号 H01L27/06
代理机构 代理人
主权项
地址