| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high performance illumination device in which a light quantity loss and peripheral light reduction are reduced, while using an LED light source and to provide a microscope device equipped with the illumination device. Ž<P>SOLUTION: The illumination device includes: a light source 10; a collimator lens 12 for condensing light from the light source; a fly eye lens 14 for superimposing the light from the collimator lens, to form a secondary light source; and a condenser lens 28 irradiating a sample surface 30 with the light emitted from the fly eye lens. The collimator lens has light distribution characteristics that satisfy the numerical aperture of the fly eye lens. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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