发明名称 OPTICAL ELEMENT AND METHOD OF CALIBRATING A MEASURING APPARATUS COMPRISING A WAVE SHAPING STRUCTURE
摘要 Optical element having an optical surface, which optical surface is adapted to a non-spherical target shape, such that a long wave variation of the actual shape of the optical surface with respect to the target shape is limited to a maximum value of 0.2 nm, wherein the long wave variation includes only oscillations having a spatial wavelength equal to or larger than a minimum spatial wavelength of 10 mm.
申请公布号 US2010177321(A1) 申请公布日期 2010.07.15
申请号 US20100684632 申请日期 2010.01.08
申请人 CARL ZEISS SMT AG 发明人 HETZLER JOCHEN;SCHILLKE FRANK;SCHULTE STEFAN;FREIMANN ROLF;DOERBAND BERND
分类号 G01B11/02 主分类号 G01B11/02
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