ELECTROSTATIC END EFFECTOR APPARATUS, SYSTEMS AND METHODS FOR TRANSPORTING SUSBTRATES,申请号WO2010US20496-传众专利搜索

发明名称	ELECTROSTATIC END EFFECTOR APPARATUS, SYSTEMS AND METHODS FOR TRANSPORTING SUSBTRATES
摘要	<p>Systems, apparatus and methods for transporting substrates between system components of an electronic device manufacturing system are provided. The systems and apparatus include an electrostatic end effector having a base, an electrode pair on the base, and spacer members for spacing the substrate from the electrode pairs to provide a gap between the electrode pair and the substrate. Methods of the invention as well as numerous other aspects are provided.</p>
申请公布号	WO2010080997(A1)	申请公布日期	2010.07.15
申请号	WO2010US20496	申请日期	2010.01.08
申请人	APPLIED MATERIALS, INC.;SUNDAR, SATISH;HUDGENS, JEFFREY, C.;CHINTALAPATI, PRUDHVI, R.;TAYLOR, WILLIAM, NIXON;LACEKY, WILLIAM, P.;BRODINE, JEFFREY, A.;HRUZEK, DEAN, C.;SILVETTI, MARIO, DAVE	发明人	SUNDAR, SATISH;HUDGENS, JEFFREY, C.;CHINTALAPATI, PRUDHVI, R.;TAYLOR, WILLIAM, NIXON;LACEKY, WILLIAM, P.;BRODINE, JEFFREY, A.;HRUZEK, DEAN, C.;SILVETTI, MARIO, DAVE
分类号	H01L21/677;B65G49/07	主分类号	H01L21/677
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