<p>A MEMS circuit comprises a MEMS device arrangement with temperature dependent output; a resistive heating circuit; and a feedback control system for controlling the resistive heating circuit to provide heating in order to maintain a MEMS device at a constant temperature. The heating is controlled in dependence on the ambient temperature, such that a MEMS device temperature is maintained at one of a plurality of temperatures in dependence on the ambient temperature. This provides power savings because the temperature to which the MEMS device is heated can be kept within a smaller margin of the ambient temperature.</p>
申请公布号
WO2010052683(A3)
申请公布日期
2010.07.15
申请号
WO2009IB54994
申请日期
2009.11.10
申请人
NXP B.V.;KONING, JAN, JACOB;VAN BEEK, JOZEF, THOMAS, MARTINUS
发明人
KONING, JAN, JACOB;VAN BEEK, JOZEF, THOMAS, MARTINUS