| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light source device preventing flickering in a light source even when high-temperature plasma (LPP) continuously oscillates in the direction of an optical axis. <P>SOLUTION: The light source device includes: a discharge lamp 1 in which a pair of electrodes 14, 15 facing each other is disposed and a discharge medium is enclosed; and an energy beam irradiation means for irradiating an energy beam 8 toward a gap between the pair of the electrodes 14, 15. The energy beam irradiation means irradiates the energy beam 8 toward a luminescent spot 61 formed in the vicinity of the tip of the electrode 15 when the discharge lamp 1 is turned on by feeding to the electrodes 14, 15. <P>COPYRIGHT: (C)2010,JPO&INPIT |
