| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron microscope device that allows simultaneous observation of a scanned electron image and an optical image and has a simple configuration. SOLUTION: The electron microscope device 1 includes a scanning electron microscope 2 and an optical microscope 3, wherein the scanning electron microscope 2 includes a scanning means 10 for scanning with an electron beam and an electron detector 12 for detecting electrons emitted from a test sample 8 scanned with the electron beam and acquires a scanned electron image based on the detection results of the electron detector, the optical microscope projects an illumination light on the test sample and receives a reflection light from the test sample to acquire an optical image, and an optical axis 7 of the scanning electron microscope crosses an optical axis 6 of the optical microscope on a point of observation of the test sample. The scanning means projects the electron beam for scanning with a scanning width wider than that of a scan area, the optical microscope projects the illumination light and acquires an optical image in an overrun portion where the electron beam is projected beyond the scan area, and the scanning electron microscope acquires a scanned electron image based on the electrons generated when the electron beam scans over the scan area. COPYRIGHT: (C)2010,JPO&INPIT
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