发明名称 SENSOR SYSTEM
摘要 A sensor system having a substrate, that has a main plane of extension, and a seismic mass, the seismic mass being developed movably about a torsional axis that is parallel to the main plane of extension; and the seismic mass having an asymmetrical mass distribution with respect to the torsional axis; and furthermore an area of the seismic mass facing the substrate is developed symmetrically with respect to the torsional axis.
申请公布号 US2010175473(A1) 申请公布日期 2010.07.15
申请号 US20090614176 申请日期 2009.11.06
申请人 CLASSEN JOHANNES 发明人 CLASSEN JOHANNES
分类号 G01P15/10 主分类号 G01P15/10
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