发明名称 |
ROBOT SYSTEMS, APPARATUS AND METHODS FOR TRANSPORTING SUBSTRATES IN ELECTRONIC DEVICE MANUFACTURING |
摘要 |
Substrate transport systems, apparatus and methods are described. The systems are adapted to efficiently put or pick substrates at a destination by rotating a boom linkage to a position adjacent to the destination and then actuating a robot assembly to put or pick the substrate at the destination. Numerous other aspects are provided. |
申请公布号 |
WO2010080983(A2) |
申请公布日期 |
2010.07.15 |
申请号 |
WO2010US20477 |
申请日期 |
2010.01.08 |
申请人 |
APPLIED MATERIALS, INC.;KREMERMAN, IZYA;HUDGENS, JEFFREY, C. |
发明人 |
KREMERMAN, IZYA;HUDGENS, JEFFREY, C. |
分类号 |
H01L21/677;B25J9/04;B25J9/06;B65G49/07 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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