发明名称 BIDIRECTIONALLY MOVABLE TABLE
摘要 <p>A Y-direction motor for an XY-table used for a bonding device is provided with a Y-direction mover (43) including a movable arm (43a) and an annular drive coil (44).  The movable arm (43a) is constructed from a rectangular cross-section pipe consisting of fiber-reinforced plastic, having one end fixed to the table, and extending in the Y-direction.  Also, the movable arm (43a) has openings (43b) formed in the surfaces of the short sides and extending in the Y-direction and moves in the XY-directions together with the table.  The annular drive coil (44) is mounted to the movable arm (43a) by being inserted in the opening (43b) in the movable arm (43a) and has a portion thereof projecting in the width direction of the movable arm from the openings (43b).  The construction speeds up operation of the bonding device.</p>
申请公布号 WO2010079632(A1) 申请公布日期 2010.07.15
申请号 WO2009JP62670 申请日期 2009.07.13
申请人 SHINKAWA LTD.;KAKUTANI,OSAMU;KONDO,YUTAKA;WADA,SYOJI 发明人 KAKUTANI,OSAMU;KONDO,YUTAKA;WADA,SYOJI
分类号 H01L21/60;G12B5/00 主分类号 H01L21/60
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