SPÜLGASBEFEUCHTUNGSVERFAHREN UND LITHOGRAPHISCHER PROJEKTIONSAPPARAT,申请号DE200460027497T-传众专利搜索

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发明名称	SPÜLGASBEFEUCHTUNGSVERFAHREN UND LITHOGRAPHISCHER PROJEKTIONSAPPARAT
摘要
申请公布号	DE602004027497(D1)	申请公布日期	2010.07.15
申请号	DE200460027497T	申请日期	2004.07.21
申请人	ENTEGRIS INC.	发明人	PAREKH, BIPIN S.;SPIEGELMAN, JEFFREY J.;ZELLER, ROBERT S.;HOLMES, RUSSELL J.
分类号	G03F7/20;G02B27/00	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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