PLASMA GENERATING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a plasma generating apparatus capable of obtaining plasmas of high density in the atmospheric pressure and making a plasma treatment process be in-line.

SOLUTION: The plasma generating apparatus includes: a cathode 10 on which non-penetrating micropores 12 opening over an entire face are formed; an anode 20 arranged in separation so as to be opposed to the face of the cathode 10; and a power supplying portion 30 for supplying power to the cathode 10 and the anode 20.

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