| 摘要 |
PROBLEM TO BE SOLVED: To provide a position recognition device and positialignon recognition method of a plate-like member for improving detection accuracy of detecting an outer edge position of the plate-like member, and to provide an alignment apparatus and alignment method. SOLUTION: Light is emitted from a support surface 24 by a ring light emitting part 23, and the support surface 24 and the outer edge WE of a wafer W are imaged by a CCD camera 3. Thereby, effect of a surface color and reflectivity of the wafer W and effect of a color and luminance of peripheral illumination can be prevented, and contrast of the support surface 24 and the outer edge WEe is enhanced and position detection accuracy of the outer edge WE of the wafer W can be improved. Further, a plurality of recognition procedures, in which colors of emitted light of the ring light emitting part 23 in imaging are changed, are carried out. By using a result corresponding to other calculation results, and recognizing a position of the outer edge WE of the wafer W, detection reliability of a position of the outer edge WE of the wafer W can be further improved. COPYRIGHT: (C)2010,JPO&INPIT |
