| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide technique capable of rapidly heating or cooling an object when the object is thermally processed. Ž<P>SOLUTION: The present invention relates to an apparatus configured to thermally process the object. The thermal processing apparatus includes a storage chamber which contains the object and an atmospheric gas, and a capacity changing means of changing the capacity of the storage chamber. The thermal processing apparatus change the capacity of the storage chamber by the capacity changing means in a state wherein the storage chamber is sealed. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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