SWITCHING ELEMENT SUBSTRATE AND MANUFACTURING METHOD THEREOF, ELECTROOPTIC DEVICE, AND PROJECTOR

摘要

PROBLEM TO BE SOLVED: To provide a switching element substrate capable of improving an opening rate and being suitable for a lighting bulb or the like of a projector. SOLUTION: The switching element substrate has a switching element having a source electrode 19, a drain electrode 21 and a gate electrode 20 which are formed on a substrate body 24, and a beam section 22 wherein one end is supported on the source electrode 19 as a fixed end and the other end can be moved by self elastic deformation as a free end and it is electrically connected with the source electrode 19. The switching element 18 is provided to perform a switching action by switching whether or not the free end of the beam section 22 is come in contact with the drain electrode 21 according to applied voltage to the gate electrode 20, and is arranged so as to make an extending direction of the beam section 22 face to a direction approximately perpendicular to the surface of the substrate body 24. COPYRIGHT: (C)2010,JPO&INPIT