| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an X-ray inspection device capable of detecting surely a fine foreign substance by a simple structure. <P>SOLUTION: The X-ray inspection device 100 capable of detecting a fine foreign substance 610 in an article 600 by irradiating an X-ray S1 to the article, and by detecting optical conversion caused by a scintillator 300 by a photodiode array (abbreviated as PDA) 400, is formed by laminating slit members 500 on the X-ray irradiation side of the scintillator 300. Especially, in the X-ray inspection device 100, the slit members 500 are laminated on the X-ray irradiation side of the scintillator 300, and in an X-ray inspection device 100a, a waterproof member 700 is further laminated. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
