| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method of easily manufacturing an electron emitting element coated with a low work function material and having a favorable electron emitting characteristic to suppress a variation in electron emitting characteristic among the elements with high reproducibility. <P>SOLUTION: In the method of manufacturing the electron emitting element, a metal oxide layer is formed on a surface of a structure before coating the underlying structure with the low work function material. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
