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发明名称
FLUORIERTE PHOTORESISTS UND VERFAHREN FÜR DIE MIKROLITHOGRAPHIE
摘要
申请公布号
DE60044493(D1)
申请公布日期
2010.07.15
申请号
DE20006044493
申请日期
2000.04.28
申请人
E.I. DUPONT DE NEMOURS AND CO.
发明人
FEIRING, ANDREW EDWARD;FELDMAN, JERALD;SCHADT, FRANK LEONARD III
分类号
G03F7/004;C08F8/18;C08F214/18;G03F7/038;G03F7/039
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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