| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an operation device to control the function of a scanning electron microscope visually which can be used as an SEM for educational use in primary and secondary schools, high schools, and universities or the like, and as a simulator for beginners of SEM operation, and used for a surface analysis field or the like where the electron beam state is used often as an experimental parameter. Ž<P>SOLUTION: The operation device of the SEM is provided with: an operating means to adjust the shape of a function of the scanning electron microscope itself and a function displayed in pattern diagrams visualizing the orbit of electron beams, or adjust the position of the electron beams displayed; a display means which displays the state after adjustment when the shape of the functions or the position of the electron beams displayed are adjusted by the operating means; a calculation means which calculates the voltage or current to the function of the SEM corresponding to the adjusted shape or adjusted position after adjustment and detected; and an implementing means which supplies the voltage or current calculated by the calculation means to the function of the SEM. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
