HOT GAS HEATER

摘要

A hot gas heater configured in such a manner that a material to be processed which is disposed in a plane perpendicular to the direction of discharge of hot gas is heated and processed over a large area thereof in a predetermined temperature range.  A hot gas heater is provided with a heating means for heating gas and also with a flow straightening and heat uniformizing means, and the configuration allows the hot gas heater to heat a material to be processed, which is disposed in a plane perpendicular to the direction of discharge of the gas, to be heated over a large area thereof.  Also, the hot gas heater has different structures for a gas flow path in the heating means, which is used to heat gas, and for a gas flow path at a discharge opening for discharging the heated gas, and the hot gas heater is provided, on the discharge opening side of the heater, with a tube body holder and a flow straightening plate which serve as the flow straightening and heat uniformizing means.  The flow straightening plate is provided in the tube body holder in such a manner that the flow straightening plate is inserted to a position between the tip of the heat generating element and the center of the tube body holder in the axis direction thereof, and this effectively provides a flow straightening effect and a heat uniformizing effect.