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发明名称
Novel polymers, Processes for polymer synthesis and Photoresist compositions
摘要
申请公布号
KR100970661(B1)
申请公布日期
2010.07.15
申请号
KR20097008576
申请日期
2002.02.26
申请人
发明人
分类号
G03F7/004;G03F7/033;C08F220/18;C08F232/00;G03F7/038;G03F7/039;G03F7/26;H01L21/027
主分类号
G03F7/004
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代理人
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