Apparatus for Generating Gas Having Extremely Low Oxygen Concentration, Processing System and Thin Film Depositing Method Therewith, and Inert Gas Generated as Such

摘要

A gas, which has extremely low oxygen and water content without particles for industrial use and is effective in processes including an oxidation preventing step, can be supplied in a large quantity. An apparatus for generating such gas having extremely low oxygen/water content is provided with an oxygen molecule discharging apparatus (26) comprising a hollow ceramic solid electrolyte body (21), through which a gas passes, and metal tube bodies (20), all of which are adhered to each other in a leak-tight manner.