| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an MEMS sensor which has a high designing flexibility for attaining further miniaturization or relaxation of a stress of a beam part, without increasing the rigidity of the beam part, while maintaining sensitivity. <P>SOLUTION: The MEMS sensor is provided with: a frame-shaped support part; a plurality of beam parts extending inside the support part; weight parts disposed inside the support part and opposed to the beam parts with a space between; a plurality of coupling parts each of which is connected with the tip portion of the beam part and with a connecting area of the weight part differing each from others and couples the weight part with each of the beam parts in a plurality; and detecting means which are provided in the beam parts and detect deformation of the beam parts, due to the movement of the weight parts. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
