METHOD OF MANUFACTURING SUBSTRATE FOR OPTICAL ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a substrate for an optical element where there is no risk of breakage or the like even when stress is applied and the shape of a side surface of a groove is controlled accurately. SOLUTION: In the method of manufacturing the substrate for the optical element, a mask 14 is formed on a surface 11a of an LN substrate 11, then a groove where the corner between the bottom surface 12a and a side surface 12b is a recessed surface 13 with a radius of curvature of 0.5μm or more is formed on the surface 11a of the LN substrate 11 using the mask 14 by a sandblasting method, and then the mask 14 is removed using fluoro-nitric acid or the like. COPYRIGHT: (C)2010,JPO&INPIT