| 摘要 |
<P>PROBLEM TO BE SOLVED: To precisely detect concentration in a concentration sensor composed to detect concentration of chemical substances in a solution to be inspected by utilizing surface acoustic waves. Ž<P>SOLUTION: The concentration sensor is composed as a self-excitation type concentration sensor including a short channel 34A and an open channel 34B. Then, as its sensor body 30, respective channel sections 34A, 34B are formed at parts close to one side end on a piezoelectric substrate 32, and five external connection terminals 36Ai-36Bi are formed at parts close to the other side end on the piezoelectric substrate 32. Then, the sensor body 30 is exposed to a storage space 76 of a solution to be inspected in the respective channel sections 34A, 34B, and the five external connection terminals 36Ai-36Bi are being exposed to an external space of a casing 70 while being supported in a cantilever form by the casing 70, thus preventing the respective channel sections 34A, 34B from being deformed and maintaining oscillation precision of surface acoustic waves. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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