| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing pad for notch polishing with which a notch part and its peripheral part can be finished into a mirror surface in notch polishing and which has a long product lifetime. <P>SOLUTION: The polishing pad has a three-layered structure wherein an inner layer part and an outer layer part of the polishing pad are different in density. The three-layered structure having the difference in density is formed having no border between the layers by impregnating a base with an urethane resin to make the outer layer part and inner layer part different in resin density. <P>COPYRIGHT: (C)2010,JPO&INPIT |
