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发明名称
BESCHICHTUNGSANLAGE MIT EINGANGSSCHLEUSE SOWIE VORRICHTUNG DAFÜR
摘要
申请公布号
AT474073(T)
申请公布日期
2010.07.15
申请号
AT20040719416T
申请日期
2004.03.11
申请人
APPLIED MATERIALS GMBH & CO. KG
发明人
SCHUESSLER, UWE;BANGERT, STEFAN;HENRICH, JUERGEN
分类号
C23C14/56
主分类号
C23C14/56
代理机构
代理人
主权项
地址
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