| 摘要 |
PROBLEM TO BE SOLVED: To provide a mesoporous silica film formed on a substrate in which the uniformity of in-plane arrangement of the pores is improved, and further, the uniformity of in-plane orientation is high even for a substrate with a curved shape. SOLUTION: In the mesoporous silica film formed on a non-single-crystalline carbon film having structural anisotropy on a substrate, in-plane arrangement of the pores is controlled in one direction which is defined by the structural anisotropy of the carbon film, over the whole of the substrate. COPYRIGHT: (C)2010,JPO&INPIT |
