| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide the drive system which can drive an equivalent capacity actuator without using a sensor. Ž<P>SOLUTION: The drive system of an equivalent capacity actuator includes an electrostatic actuator 20, a variable capacitor 30 connected in series with the electrostatic actuator 20, a constant voltage source 10 which applies a voltage across the series connection of the electrostatic actuator 20 and the variable capacitor 30, an estimation means 60 which estimates the state of the electrostatic actuator 20 from the voltage at the joint of the electrostatic actuator 20 and the variable capacitor 30 connected in series and the capacitance of the variable capacitor 30, and a control means 50 which controls the capacitance of the variable capacitor 30 based on the estimation results of the estimation means 60, wherein the applied voltage to the electrostatic actuator 20 is regulated by controlling the capacitance of the variable capacitor 30. The drive system can estimate the state of the electrostatic actuator 20 without using a sensor for detecting the gap of the electrostatic actuator 20. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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