| 摘要 |
PROBLEM TO BE SOLVED: To provide a thickness measuring device and a thickness measuring method capable of measuring the thickness of an optically transparent object, even when it is difficult to discriminate between a receiving position of light returning from its front face and a receiving position of light returning from the rear face. SOLUTION: The thickness measuring device 1 includes: a light projecting part 2; a light receiving part 13 capable of respectively receiving light L23 reflected by an arrangement surface when no optically transparent objects 9 are present on the arrangement surface 11A, and light L22 reflected by the rear face when the optically transparent object is present on the arrangement surface; and a measuring part 8 for measuring the thickness of the optically transparent object on the basis of the correlation between the distance ΔX2 between a receiving position X3 of light reflected at the light receiving part and a receiving position X2 of light reflected by the rear face, and the thickness d1 of the optically transparent object. COPYRIGHT: (C)2010,JPO&INPIT
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