| 摘要 |
<p>The component (10) has a fixed anti element (13) that is arranged between a deflected diaphragm (11) and another diaphragm (12). The fixed anti element functions as an electrode of a capacitance, where the latter diaphragm forms another electrode of another capacitance. An independent claim is also included for a method for manufacturing a component with micromechanical microphone structure.</p> |
